Metrology & Characterization 

Process control and monitoring all along the process flow is essential. Vmicro’s metrology capability allows the measurement of typical parameters of interest during process or on the final devices. 

  • Process control at every step: 
    layer thickness, lateral dimensions, roughness, composition, resistivity
  • High precision equipment: SEM, AFM, Ellipsometer
  • Electrical characterization: I/V