Design and technical studies

Vmicro works at all Technological Readiness Levels (TRLs): from ideas at TRL1 to  preproduction runs at TRL7-9.

  • Test your device concept with short design / technological loops to help decision-making.
  • Establish design rules for TRL increase.
  • Reproducibility and reliability studies.
  • Explore design variations for : 
    • preparing larger scale transfert to foundry 
    • device performance assessments.

Process Capabilities

From single step operation to complex sequences, Vmicro provides technological processes tailored to customers applications. We assist our customers at each step of their processes, from design rules definition to back-end integration.

Vmicro staff work in a 1600 m2 cleanroom, which is part of the IEMN laboratory facilities. The fabrication equipment are operated in a highly flexible way that enables Vmicro to propose very individual solutions, with low processing times and lot size matching customers needs.

Vmicro’s main know-how is based on years of experience in micro and nanotechnology and covers silicon processing for MEMS, photonic and electron devices.


Vmicro’s completed and ongoing projects have involved multi-scale process engineering ranging from 100 nm to 100 µm. Today we are thus able to offer a large variety of advanced lithography processes both in optical and e-beam lithography.


Thin film processing

Vmicro has access to a wide range of different techniques from sputtering tools to evaporators, LPCVD and PECVD, as well as oxidation and diffusion furnaces. We also provide solutions for thin films doping and annealing.


Bonding / Back-End

Vmicro also provides a variety of capabilities for back-end wafer processing.



Etching processes are critical for MEMS and microfabrication. Vmicro has developed a large experience in that domain and proposes standard and key processes using wet and dry etching techniques.


Metrology & Characterization

Process control and monitoring all along the process flow is essential. Vmicro’s metrology capability allows the measurement of typical parameters of interest during process or on the final devices. 


Processed samples

Vmicro is able to work with various sample materials and sizes.