MEMS Engineering

We specialize in Micro-Electro-Mechanical Systems (MEMS) engineering, leveraging our extensive expertise to design and manufacture high-performance devices.

MEMS Design:

We offer comprehensive support in MEMS design, collaborating closely with our clients to develop efficient and high-performance devices. Our expertise covers all stages of the design process, from defining specifications to modeling, simulation, and prototype fabrication. We optimize design rules according to your specific requirements, ensuring that each project meets the highest standards of quality and functionality. With our deep knowledge of materials, transduction techniques, and manufacturing processes such as Deep Reactive-Ion Etching (DRIE), we provide customized solutions tailored to the unique needs of each client.

Materials and Processes:

  • SOI Wafer Processing
    • Expertise in handling and processing both standard and double SOI wafers for advanced MEMS applications.
  • Deep Reactive-Ion Etching (DRIE)
    • Advanced DRIE capabilities to etch silicon structures ranging from 10 nm to 1 mm in depth.
  • Deposited Materials Fabrication
    • Utilizing silicon nitride, silicon oxide, and polycrystalline silicon to create robust and reliable MEMS structures.

 

Key Transduction Techniques:

  • Capacitive Transduction
    • Detecting mechanical movements through changes in capacitance.
  • Piezoresistive Transduction
    • Measuring variations in electrical resistance caused by mechanical stress.
  • Photonic Transduction
    • Utilizing optical methods for high-precision measurements.

Applications:

  • Inertial Sensors
  • Microphones
  • Pressure Sensors
  • Resonators
  • Piezoresistive Gauges
  • Advance sensing devices


By combining our deep knowledge in MEMS engineering with advanced materials and transduction methods—alongside our cutting-edge DRIE etching capabilities—we deliver customized solutions that meet the specific needs of our clients.

For more information on our expertise, please click on the menus below: