Ring probes

This concept was engineered at CNRS-IEMN during 10 years of academic research and protected by several patents.

Vmicro leads the industrial transfer of the MEMS sensor, a key element for the proposed high bandwidth AFM.

Ring probes capabilities:

  • Self-Sensing & Self-Actuating using capacitive transduction.
  • High frequency resonator operating at 13 Mhz.
  • Batch fabricated silicon tip

 

 

Related publications:

When capacitive transduction meets the thermomechanical limit : towards femto-Newton force sensors at very high frequency
HOUMADI S., LEGRAND B., SALVETAT J.P., WALTER B., MAIRIAUX E., AIME J.P., DUCATTEAU D., MERZEAU P., BUISSON P., ELEZGARAY J., THERON D., FAUCHER M.
28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015, Estoril, Portugal, january 18-22 - 150-153
doi: 10.1109/MEMSYS.2015.7050908

Near-field microscopy : is there an alternative to micro and nano resonating cantilevers ?
BUCHAILLOT L., MAIRIAUX E., WALTER B., XIONG Z., FAUCHER M., LEGRAND B., THERON D., ALGRE E.
IEEE International Frequency Control Symposium, IFCS 2014, Taipei, Taiwan, may 19-22, 2014, paper 2160, 2 pages

doi: 10.1109/FCS.2014.6859928

Microwave reflectometry : a high-resolution technique for measuring vibration of capacitive microresonators
LEGRAND B., DUCATTEAU D., THERON D., WALTER B., TANBAKUCHI H.
17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2013, Barcelona, Spain, june 16-20 566-569
doi: 10.1109/Transducers.2013.6626829

Silicon MEMS resonators : a story from signal processing devices to atomic force microscopy sensors
LEGRAND B., FAUCHER M., BUCHAILLOT L., MAIRIAUX E., WALTER B., XIONG Z.
6th Joint IEEE International Frequency Control Symposium and European Frequency and Time Forum, IFCS-EFTF 2013, Prague, Czech Republic, july 21-25, 2013, paper IFCS-EFTF4-C2-1

DNA origami imaging with 10.9 MHz AFM MEMS probes
WALTER B., MAIRIAUX E., XIONG Z., FAUCHER M., BUCHAILLOT L., LEGRAND B.
25th IEEE Conference on Micro Electro Mechanical Systems, MEMS 2012, Paris, France, january 29-february 2 (2012) 555-558
doi: 10.1109/MEMSYS.2012.6170236

4.8 MHz AFM nanoprobes with capacitive transducers and batch-fabricated nanotips
WALTER B., FAUCHER M., MAIRIAUX E., XIONG Z., BUCHAILLOT L., LEGRAND B.
24th International Conference on Micro Electro Mechanical Systems, MEMS 2011, Cancun, Mexico, january 23-27 (2011) 517-520
doi: 10.1109/MEMSYS.2011.5734475

Surface microscopy with laserless MEMS based AFM probes
ALGRE E., LEGRAND B., FAUCHER M., WALTER B., BUCHAILLOT L.
23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010, Hong Kong SAR, China, january 24-28
doi: 10.1109/MEMSYS.2010.5442509

Proposition of atomic force probes based on silicon ring-resonators
FAUCHER M., WALTER B., ROLLIER A.S., SEGUENI K., LEGRAND B., COUTURIER G., AIMÉ J.P., BERNARD C., BOISGARD R., BUCHAILLOT L.
14th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers'07, Lyon, France, june 10-14 - (2007) 1529-1532
doi: 10.1109/SENSOR.2007.4300436