
Lprobes are based on a new MEMS patented technology enabling improvements as compared to silicon AFM cantilevers with tip fabricated using mainstream processes developed in the 90’s.
Vmicro In-plane technology enables full batch fabrication of tips with high lengths, low masses and high aspect ratios not only close to apex.
Both cantilever and tip are made of highly doped monocrystalline silicon.
Lprobes are compatible with most SPMs. Our chip is designed with vertical sidewalls that enable safer handling with tweezers.