Unique advantages

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Order code : PCP05_Au-Si-05

Probe overview

Special packaging

Spectroscopy and images with SNOM tips that have been packaged in standard AFM Gel-Pak boxes can lead to artifacts in the optical response. This is due to contamination of the tip by a few molecules of the gel. Vmicro has developed a back-end process with special decontamination and storage in a metal box. You can select this feature as an option when selecting your reference.


Nano-FTIR spectra normalized and obtained at the SMIS beamline at Synchrotron SOLEIL. (Courtesy F. Borondics – G. Németh)

Features

Lprobes are based on a new MEMS patented technology enabling improvements as compared to silicon AFM cantilevers with tip fabricated using mainstream processes developed in the 90’s.

Vmicro In-plane technology enables full batch fabrication of tips with high lengths, low masses and high aspect ratios not only close to apex.

The cantilever is made of highly doped monocrystalline silicon.

Lprobes are compatible with most SPMs. Our chip is designed with vertical sidewalls that enable safer handling with tweezers.

Probe parameters

Resonant frequency (kHz)
Nom.
Typical range
12
5-20
Spring constant (N/m)
Nom.
Typical range
0.05
0.01-0.1

Cantilever

Cantilever (nominal values)
L (µm)
W (µm)
t (µm)
400
20
1.6
Coating
Cantilever back side
Gold
Tip side
None

Highly conductive silicon cantilever with a 40nm thick gold coating on the top side, providing optimal laser reflection.

Tip

Tip dimensions
Nom.
Typical range
Tip height T (µm)
05
05
20x20µm
+/-5%
  • 11° Tilted flat-end platform
  • 20×20µm flat surface parallel to the sample