Unique advantages

Applications

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Order code : LT040_P2-P2-30

Probe overview

Special packaging

Spectroscopy and images with SNOM tips that have been packaged in standard AFM Gel-Pak boxes can lead to artifacts in the optical response. This is due to contamination of the tip by a few molecules of the gel. Vmicro has developed a back-end process with special decontamination and storage in a metal box. You can select this feature as an option when selecting your reference.


Nano-FTIR spectra normalized and obtained at the SMIS beamline at Synchrotron SOLEIL. (Courtesy F. Borondics – G. Németh)

Features

Lprobes are based on a new MEMS patented technology enabling improvements as compared to silicon AFM cantilevers with tip fabricated using mainstream processes developed in the 90’s.

Vmicro In-plane technology enables full batch fabrication of tips with high lengths, low masses and high aspect ratios not only close to apex.

Both cantilever and tip are made of highly doped monocrystalline silicon.

Lprobes are compatible with most SPMs. Our chip is designed with vertical sidewalls that enable safer handling with tweezers.

Probe parameters

Resonant frequency (kHz)
Nom.
Typical range
300
200-350
Spring constant (N/m)
Nom.
Typical range
40.0
24-55

Cantilever

Cantilever (nominal values)
L (µm)
W (µm)
t (µm)
115
40
3.3
Coating
Cantilever back side
P2
Tip side
P2

Thick platinum coating on both sides of the cantilever and all faces of the tip, optimized for s-SNOM in the infrared and THz ranges.

Tip

Tip dimensions
Nom.
Typical range
Tip height T (µm)
30
15-50
Apex radius (nm)
50
35-75
  • Tilted tip design
    Compensates for the AFM head’s mounting angle, ensuring accurate data on diverse sample surfaces.
  • Tip height >30 µm
    Optimal optical access for s-SNOM mode
  • Half-cone angle < 10° over the last 10 µm 
    Minimizes tip-sample convolution, ensuring more accurate morphological measurements.
  • Conductive Tip
    Thick conductive platinum layer all faces of the tip, typical apex radius is 50nm. The coating is optimized for s-SNOM applications.