Metrology & Characterization
Process control and monitoring all along the process flow is essential. Vmicro’s metrology capability allows the measurement of typical parameters of interest during process or on the final devices.
- Process control at every step:
layer thickness, lateral dimensions, roughness, composition, resistivity - High precision equipment: SEM, AFM, Ellipsometer
- Electrical characterization: I/V
- Four-terminal sensing
- SEM analysis of resolution test pattern